State of the art digital design
Todays EL-FLOW®Select series is equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response (settling times t98 down to 500 msec). The main digital pc-board contains all of the general functions needed for measurement and control. The EL-FLOW®Select design features Multi Gas / Multi-Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For more information see our ‘MASS-FLOWSelect’ leaflet.
In addition to the standard RS232 output, the instruments also offer analog I/O. Furthermore, an integrated interface board provides DeviceNetTM, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols. The latter is a Fieldbus based RS485, specifically designed by Bronkhorst for their mass flow metering and control solutions.
Mass Flow Controllers for every application
The control valve can be furnished as an integral part of an EL-FLOW® Select MFC or as a separate component. It is a proportional, electromagnetic control valve with extremely fast and smooth control characteristics. With reference to the specific field of application, there are different series of control valves. There is a standard direct acting valve for common applications, a pilot operated valve for high flow rates, the so-called Vary-P valve that can cope with 6 up to 400 bar ΔP and a bellows valve for applications with very low differential pressure.
General EL-FLOW®Select features:
- Fast response, excellent repeatability.
- High accuracy.
- Virtually pressure and temperature independent.
- Pressure ratings up to 400 bar.
- Optional metal sealed and down ported constructions.
Digital features
- DeviceNetTM, PROFIBUS DP, Modbus-RTU/ASCII, EtherCAT®, PROFINET or FLOW-BUS slave; RS232 interface.
- Optional Multi Gas / Multi-Range functionality up to 10 bar.
- Storage of max. 8 calibration curves.
- Alarm and counter functions.
- Control characteristics user-configurable.
Technical specifications
|
Measurement/ control system |
|
|
Accuracy (incl. linearity) : |
standard: ±0,5% Rd plus ±0,1%FS |
|
(based on actual calibration) |
±2% FS for F-110C-002/F-200CV-002 |
|
Turndown : |
1 : 50 (in digital mode up to 1:187,5) |
|
Repeatability : |
< 0,2% Rd |
|
Settling time (controller) : |
standard: 1…2 seconds option: down to 500 msec |
|
Control stability : |
< ±0,1% FS (typical for 1 ln/min N2) |
|
Operating temperature : |
-10…+70°C |
|
Temperature sensitivity : |
zero: < 0,05% FS/°C; span: < 0,05% Rd/°C |
|
Pressure sensitivity : |
0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 |
|
Leak integrity, outboard : |
tested < 2 x 10-9 mbar l/s He |
|
Attitude sensitivity : |
max. error at 90° off horizontal 0,2% at 1 bar, typical N2 |
|
Warm-up time : |
30 min. for optimum accuracy 2 min. for accuracy ± 2% FS |
Mechanical parts
|
Material (wetted parts) : |
stainless steel 316L or comparable |
|
Process connections : |
compression type or face seal couplings |
|
Seals : |
standard: Viton®; options: EPDM, Kalrez® (FFKM) |
|
Ingress protection (housing) : |
IP40 |
Electrical properties
|
Power supply : |
+15…24 Vdc |
|
Max. power consumption : |
Supply at voltage I/O at current I/O |
|
Meter: |
15 V 95 mA 125 mA 24 V 65 mA 85 Ma |
|
Controller: |
15 V 290 mA 320 mA 24 V 200 mA 215 mA |
|
Extra for fieldbus: |
PROFIBUS DP: add 53 mA (at 15 V) or 30 mA (at 24 V) |
|
(if applicable) EtherCAT® : |
add 66 mA (at 15 V) or 41 mA (at 24 V) |
|
PROFINET : |
add 77 mA (15 V supply) or 48 mA (24 V supply) |
|
DeviceNetTM: |
add 48 mA (at 24 V) |
|
Analog output/command : |
0...5 (10) Vdc or 0 (4)…20 mA (sourcing output) |
|
Digital communication : |
standard: RS232 options: PROFIBUS DP, DeviceNetTM, EtherCAT®, Modbus-RTU/ASCII, PROFINET, FLOW-BUS |
Electrical
|
Analog/RS232 : |
9-pin D-connector (male); |
|
PROFIBUS DP : |
bus: 9-pin D-connector (female); power: 9-pin D-connector (male); |
|
DeviceNetTM : |
5-pin M12-connector (male); |
|
EtherCAT®/ PROFINET : |
2 x RJ45 modular jack (in/out) |
|
FLOW-BUS/Modbus-RTU/ASCII : |
RJ45 modular jack |
Technical specifications and dimensions subject to change without notice.
Models and flow ranges (based on Air)
|
Mass Flow Meters (MFM); PN100 (pressure rating 100 bar) |
||
|
Model |
min. flow |
max. flow |
|
F-110C |
0,014…0,7 mln/min |
0,06…9 mln/min |
|
F-111B |
0,16…8 mln/min |
0,16…25 ln/min |
|
F-111AC |
0,4…20 ln/min |
0,6…100 ln/min |
|
F-112AC |
0,8…40 ln/min |
1,4…250 ln/min |
|
F-113AC |
4…200 ln/min |
8…1670 ln/min |
For ranges of 200 or 400 bar rated MFMs see model number identification.
|
Mass Flow Controllers (MFC); PN64 / PN100 |
||
|
Model |
min. flow |
max. flow |
|
F-200CV/F-210CV 1) |
0,014…0,7 mln/min |
0,06…9 mln/min |
|
F-201CV/F-211CV 1) |
0,16…8 mln/min |
0,16…25 ln/min |
|
F-201AV/F-211AV 1) |
0,4…20 ln/min |
0,6…100 ln/min |
|
F-202AV/F-212AV 2) |
0,8…40 ln/min |
1,4…250 ln/min |
|
F-203AV/F-213AV 3) |
4…200 ln/min |
8…1670 ln/min |
|
1) Kv-max = 6,6 x 10-2 |
|
2) Kv-max = 0,4 |
|
3) Kv-max = 1,5 |
|
MFCs for high-pressure / high-ΔP applications; PN400 |
||
|
Model |
min. flow |
max. flow |
|
F-230M |
0,2…10 mln/min |
10…500 mln/min |
|
F-231M |
10…500 mln/min |
0,2…10 ln/min |
|
F-232M |
0,2…10 ln/min |
2…100 ln/min |
> Thermal mass flow measuring principle
The heart of the thermal mass flow meter/controller is the sensor, that consists of a stainless steel capillary tube with resistance thermometer elements. A part of the gas flows through this bypass sensor and is warmed up by heating elements. Consequently the measured temperatures T1 and T2 drift apart. The temperature difference is directly proportional to mass flow through the sensor. In the main channel, Bronkhorst applies a patented laminar flow element consisting of a stack of stainless steel discs with precision-etched flow channels. Thanks to the perfect flow-split the sensor output is proportional to the total mass flow rate.
Mass Flow Meter
|
Model |
A |
B |
C |
H |
K |
Weight (kg) |
|
F-110C (1/8” OD) |
47 |
98 |
47 |
111 |
25 |
0,4 |
|
F-111B (1/4” OD) |
69 |
126 |
47 |
111 |
25 |
0,5 |
|
F-111AC (1/4” OD) |
69 |
126 |
47 |
123 |
26 |
0,6 |
|
F-112AC (1/2” OD) |
65 |
130 |
47 |
139 |
59 |
1,3 |
|
F-113AC (1/2” OD) |
112 |
179 |
47 |
153 |
74 |
3,0 |
Mass Flow Controller
|
Model |
A |
B |
C |
H |
K |
Weight (kg) |
|
F-200CV/F-210CV (1/8” OD) |
77 |
128 |
47 |
111 |
25 |
0,6 |
|
F-201CV/F-211CV (1/4” OD) |
77 |
134 |
47 |
111 |
25 |
0,6 |
|
F-201AV/F-211CV (1/4” OD) |
78 |
135 |
47 |
123 |
26 |
0,7 |
|
F-202AV/F-212AV (1/2” OD) |
112 |
169 |
47 |
139 |
59 |
2,1 |
|
F-203AV/F-213AV (1/2” OD) |
171 |
238 |
47 |
153 |
74 |
4,9 |
|
F-220M/F-221M (1/4” OD) |
85 |
139 |
47 |
126 |
28 |
0,9 |
|
F-230M/F-231M/F-232M (1/4” OD) |
115 |
172 |
47 |
163 |
69 |
3,4 |
Fields of application The EL-FLOW® series have been successfully applied in a wide variety of both OEM and laboratory applications in the following markets (typically):
- Semiconductor processing
- Analysis and environmental measurements
- Burner control
- Vacuum technology
- Surface treatment installations
- Process control in food, pharmaceutical and (petro-) chemical industries
To give an impression of the many varied applications, we hereby sketch some basic examples. In reality, these applications are commonly far more complex and with far more variations and adaptations.
Burner control
Burner control using Mass Flow Controllers brings many advantages compared to conventional systems, where the flow is adjusted through needle valves. When burner orifices get clogged or when gas supply pressure varies, an MFC will automatically adapt to the changed conditions. For the control of relatively large flows with low differential pressure, which is typical for natural gas or CH4, Bronkhorst offers mass flow meters with separate pressure compensated bellows valves.
> Making gas mixtures
MFC’s are often used to make precise and stable mixtures of two or more gases. A Bronkhorst® PS/Readout system can be applied to maintain the ratio of mixed gases by operating in master-slave mode. In the example above, the flow range of gas 1 is much smaller than the other. For this purpose Bronkhorst developed a gas mixer, to guarantee a homogeneous gas mixture.
> Feeding of reactors
Flow control is often combined with the control of reactor pressure, using an EL-PRESS back pressure controller, or as depicted, an EL-PRESS Pressure Meter with integrated PI-controller. Typical applications: high-pressure hydrogenation systems and autoclave processes using a 400 bar rated Mass Flow Controller with Vary-P control valve.